Cov yeeb yaj kiab kub (Au) thiab tooj liab (Cu) feem ntau pom cov adhesion tsis zoo thaum tso ncaj qha rau iav, quartz, lossis silicon. Ib txheej nyias nyias (Cr) adhesion yog li ntawd feem ntau tso ua ntej los txhim kho kev sib raug zoo thiab txheej kev ntseeg tau.
Yog li vim li cas cov txheej nyias nyias ua qhov txawv li ntawd?
Vim li cas cov yeeb yaj kiab kub thiab tooj liab nyiam tev tawm?
Qhov chaw ntawm iav, quartz, thiab silicon yog cov tshuaj ruaj khov, ua rau nws nyuaj rau ntau cov hlau los tsim cov ntawv cog lus muaj zog nrog cov substrates. Thaum kub los yog tooj liab tso ncaj qha mus rau cov ntaub ntawv no, cov yeeb yaj kiab feem ntau tso siab rau kev sib cuam tshuam ntawm lub cev tsis muaj zog ntawm qhov sib cuam tshuam es tsis yog cov tshuaj muaj zog sib txuas. Yog li ntawd, cov txheej yuav tev, tawg, los yog delaminate thaum lub sij hawm thermal cycling, dicing, ntim, los yog lwm yam posts -deposition txheej txheem.
Qhov txawv yog los ntawm cov khoom ntawm cov hlau lawv tus kheej.
- Kubyog ib qho zoo heev inert noble hlau nrog tsawg heev affinity rau oxygen. Hloov chaw ntawm kev sib txuas nrog cov oxide-nplua nuj nto ntawm iav los yog silicon, kub atoms nyiam sib raug zoo rau ib leeg. Qhov no txwv qhov adhesion ntawm cov zaj duab xis deposited thiab substrate.
- Tooj Nws muaj tshuaj lom neeg ntau dua li kub, tab sis nws kuj tseem tsim cov kev sib txuas tsis muaj zog nrog cov iav los yog silicon oxide nyob rau hauv cov xwm txheej raug tso tawm. Vim li no, cov yeeb yaj kiab tooj liab feem ntau xav tau txheej adhesion thaum tso rau ntawm oxide-raws li substrates.
Qhov no yog vim li cas chromium yog dav siv los ua ib txheej adhesion. Muab tso rau ntawm lub substrate thiab cov yeeb yaj kiab hlau ua haujlwm, nws tsim kom muaj kev sib txuas ruaj khov dua thiab txhim kho cov txheej txheej adhesion.
Chromium Txhim Kho Adhesion li cas?
Chromium feem ntau tau piav qhia tias yog txheej txheej adhesion, tab sis nws tsis ua zoo li cov nplaum nplaum. Hloov chaw, nws tsim kom muaj kev sib txuas ruaj khov ntawm cov substrate thiab cov yeeb yaj kiab hlau ua haujlwm, tso cai rau cov txheej txheem kom ruaj ntseg dua.
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Bonding rau lub substrate
Chromium yog tshuaj ntau dua li cov hlau xws li kub lossis tooj liab. Thaum lub sij hawm tso tawm, nws nkag siab cuam tshuam nrog cov pa ntawm cov iav, silicon oxide, thiab ntau cov ceramic substrates, tsim ib txheej nyias chromium oxide (Cr₂O₃) interfacial txheej. Cov txheej no ntxiv dag zog rau kev sib raug zoo ntawm txheej txheej thiab substrate, muab lub hauv paus ruaj khov rau cov khaubncaws sab nraud povtseg saum toj no.
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Bonding rau Functional Metals
Ntxiv nrog rau kev sib raug zoo nrog lub substrate, chromium kuj tsim ib qho chaw ruaj khov nrog cov hlau xws li kub, tooj liab, thiab npib tsib xee. Yog li ntawd, ib tug nyias nyias - zaj duab xis qauv muaj peb txheej:
Substrate → Chromium Adhesion Layer → Functional Metal Film
Cov txheej chromium ua haujlwm raws li cov txheej txheem hloov pauv ntawm substrate thiab cov txheej txheem ua haujlwm, txhim kho tag nrho adhesion ntawm zaj duab xis system.
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Nyias tab sis siv tau
Ib txheej chromium adhesion feem ntau tsuas yog5-20 nmtuab. Txawm hais tias nws cov tuab me me, nws tuaj yeem txhim kho cov txheej txheej adhesion yam tsis muaj kev cuam tshuam rau hluav taws xob conductivity, kho qhov muag, lossis lwm yam kev ua haujlwm ntawm cov yeeb yaj kiab hlau. Qhov no yog ib qho ntawm cov laj thawj vim li cas chromium tseem yog ib qho ntawm feem ntau siv adhesion - cov ntaub ntawv txheej hauv nyias - zaj duab xis deposition.
Qhov twg yog Chromium siv los ua Adhesion Layer?
Vim nws lub peev xwm los txhim kho kev sib txuas ntawm lub ntsej muag, chromium yog dav siv hauv nyias - zaj duab xis tso tawm thoob plaws ntau yam kev lag luam. Cov ntawv thov ib txwm muaj xws li:
- Kub films ntawm iav substrate
- Copper interconnects ntawm silicon wafers
- Optical coatings thiab reflective films
- MEMS cov khoom siv
- Semiconductor metallization
- Sensor electrodes
- OLED thiab zaub technologies
Hauv feem ntau nyias - daim ntawv thov zaj duab xis, chromium ua haujlwm raws li cov txheej hauv qab es tsis yog txheej txheej ua haujlwm kawg.
Yuav siv Chromium li cas hauv Nqus Deposition?
Hauv thermal evaporation thiab electron beam evaporation, chromium feem ntau muab los ua cov khoom siv rau nyias - zaj duab xis deposition. Raws li cov txheej txheem evaporation thiab cov txheej txheem yuav tsum tau ua, nws muaj nyob rau hauv ntau hom, nrog rau cov pellets, pieces, thiab rods.Chromium pelletsyog dav siv nyob rau hauv lub chaw soj nstuam thiab industrial txheej txheej vim hais tias lawv yog ib qho yooj yim mus thauj khoom thiab muab evaporation ruaj khov.
Rau magnetron sputtering thiab lwm yam PVD txheej txheem, chromium yog muab raws liChromium Sputtering Targets. Kev xaiv ntawm cov khoom siv chromium nyob ntawm cov txheej txheem tso nyiaj thiab khoom siv.
Txheej txheem lus qhia
Khaws cov Chromium Txheej nyias
Ib txheej chromium adhesion feem ntau tsuas yog ob peb nanometers tuab. Cov thickness ntau dhau tuaj yeem ua rau muaj kev ntxhov siab hauv zaj duab xis thiab, hauv cov txheej txheem kho qhov muag, tuaj yeem txo qhov kis tau tus mob.
Deposit tsis tawg lub nqus tsev vacuum
Thaum twg ua tau, tso cov chromium txheej thiab cov txheej txheem hlau ua haujlwm hauv tib lub tshuab nqus tsev. Kev raug rau huab cua tuaj yeem oxidize chromium nto thiab txo nws txoj kev sib txuas.
Siv High-Purity Chromium
Qhov zoo ntawm cov khoom evaporation cuam tshuam rau txheej txheej. High -purity chromium cov ntaub ntawv uas tsis muaj impurity theem pab txhim kho cov txheej txheem ruaj khov thiab txo qhov kev pheej hmoo ntawm kev kis kab mob thaum tso tawm.
Xaus
Txawm hais tias tsuas yog ob peb nanometers tuab, chromium adhesion txheej plays lub luag haujlwm tseem ceeb hauv kev txhim kho txheej kev ntseeg tau. Txawm hais tias rau kev tsim khoom semiconductor, optical coatings, los yog kev tshawb fawb daim ntawv thov, xaiv cov khoom siv chromium uas tsim nyog yog ib feem tseem ceeb ntawm kev ua tiav cov kev ua tau zoo ntawm cov yeeb yaj kiab.