Lub hom phiaj sputtering, raws li cov thev naus laus zis ntawm qhov chaw engineering thiab nyias zaj duab xis thev naus laus zis, hais txog kev siv cov ions lossis lwm cov khoom siv hluav taws xob los ntaus lub hom phiaj hauv lub zog siab, yog li ua rau lub zog hloov pauv hloov pauv thiab cov khoom thauj ntawm lub hom phiaj atoms lossis molecules. . Cov atoms los yog molecules zoo siab tawg tawm ntawm lub hom phiaj nto thiab tso rau ntawm lub substrate nyob rau hauv ib tug high-ceev tsab ntawv tsa suab, tsim ib tug nyias zaj duab xis nrog ib tug uniform los yog cov qauv.
1. Kev faib tawm
(1) DC sputtering
Lub hauv paus ntsiab lus: DC sputtering siv lub zog DC tas li raws li lub zog siv hluav taws xob, thiab feem ntau yog tsim rau cov hom phiaj nrog cov khoom siv zoo, xws li hlau.
Nta: Nws muaj qhov zoo ntawm cov khoom siv yooj yim, kev ua haujlwm yooj yim thiab kev tso nyiaj siab. Qhov no tsis siv rau cov ntaub ntawv insulating, vim lawv tsis tuaj yeem tsim kom muaj kev thauj mus los tau zoo.
(2) Xov tooj cua zaus sputtering
Lub hauv paus ntsiab lus: Xov tooj cua zaus sputtering siv xov tooj cua zaus hwj chim (feem ntau nyob rau hauv lub MHz range) kom cov ntaub ntawv uas tsis yog-conductive (xws li ceramics, oxides) kuj sputtered.
Nta: Muaj peev xwm sputter insulating cov ntaub ntawv nrog ntau dua deposition uniformity. Txawm li cas los xij, vim yog lub zog siv hluav taws xob thiab kev tswj hwm qhov nyuaj, tus nqi thiab kev saib xyuas nyuaj yog qhov siab.
(3) Magnetron sputtering
Lub hauv paus ntsiab lus: Raws li ib txwm siv sputtering, ib qho chaw sib nqus yog tsim los ntawm kev tso cov hlau nplaum ze ntawm lub hom phiaj, yog li txhim kho qhov ceev thiab ruaj khov ntawm cov ntshav.
Nta: Txhim kho sputtering efficiency thiab zaj duab xis zoo, txo lub hom phiaj noj. tuaj yeem ua haujlwm ntawm huab cua qis, yog li txo qhov cuam tshuam ntawm cov pa hauv cov yeeb yaj kiab.
(4) Reactive sputtering
Lub hauv paus ntsiab lus: Thaum lub sij hawm sputtering txheej txheem, reactive gases (xws li oxygen, nitrogen) yog nkag mus rau hauv lub chaw ua hauj lwm rau chemically react nrog lub hom phiaj atoms los ua ib tug compound zaj duab xis.
Nta: Ntau yam ntawm cov yeeb yaj kiab sib xyaw tuaj yeem npaj tau, xws li oxides, nitrides, carbides, thiab lwm yam. Txawm li cas los xij, kev tswj xyuas yog qhov nyuaj thiab yuav tsum tau kho qhov tseeb ntawm qhov ntws thiab siab ntawm cov roj reactive.
(5) Siab zog mem tes magnetron sputtering
Lub hauv paus ntsiab lus: Siv cov khoom siv hluav taws xob siab zog los tsim cov plasma high-density rau lub sijhawm luv luv kom nce tus nqi sputtering.
Nta: Cov yeeb yaj kiab du thiab ntom ntom tuaj yeem tau txais. Tab sis vim muaj kev siv hluav taws xob siab, kev tswj xyuas thermal thiab kev ua haujlwm ntev ntawm cov cuab yeej ua cov teeb meem.
2. Daim ntawv thov
(1) Kev lag luam semiconductor
Sputtering thev naus laus zis yog siv los tso cov khoom siv hluav taws xob, insulating thiab tiv thaiv cov khaubncaws sab nraud povtseg uas yog qhov tseem ceeb rau kev tsim cov khoom siv hluav taws xob zoo thiab cov khoom siv microelectronic.
(2) Kev siv kho qhov muag
Daim iav thiab cov txheej tiv thaiv kev cuam tshuam: Cov yeeb yaj kiab nyias npaj los ntawm cov txheej txheem sputtering tuaj yeem siv los tsim ntau yam khoom siv kho qhov muag xws li lo ntsiab muag, lo ntsiab muag thiab iav hauv laser tshuab. Lub teeb-absorbing txheej thiab txheej conductive nyob rau hauv lub hnub ci hlwb kuj feem ntau npaj los ntawm sputtering.
(3) Kho kom zoo nkauj txheej
Automotive thiab kev tsim kho kev lag luam: Sputtered films yog siv rau cov hniav coatings ntawm automotive qhov chaw thiab lub tsev cov ntaub ntawv, tsis tsuas yog muab ib tug zoo nkauj tsos, tab sis kuj ua rau kom cov khoom hnav thiab corrosion kuj. Cov casings thiab cov khoom siv kho kom zoo nkauj ntawm cov neeg siv khoom siv hluav taws xob xws li xov tooj ntawm tes thiab khoos phis tawj kuj feem ntau siv cov tshuab sputtering los tsho tiv thaiv cov yeeb yaj kiab zoo nkauj thiab zoo nkauj.
(4) Cov yeeb yaj kiab ua haujlwm tshwj xeeb
Nws tuaj yeem tso cov yeeb yaj kiab siab tawv thiab hnav-tiv taus rau ntawm qhov chaw ntawm cov cuab yeej thiab pwm kom ntev lub cuab yeej. Ntxiv mus, sputtered films yuav siv tau los kho lub teeb transmittance nyob rau hauv ntse qhov rais technology rau vaj tse thiab tsheb.
(5) Biomedical teb
Cov yeeb yaj kiab biocompatible feem ntau tso los ntawm cov txheej txheem sputtering los txhim kho cov kev sib raug zoo ntawm cov pob qij txha lossis cov hniav cog hniav nrog tib neeg lub cev.
FANMETAL tuaj yeem muab cov neeg siv khoom nrog ntau lub hom phiaj hlau sputtering, xws li Titanium Aluminium Sputtering Targets, Tungsten Targets thiab Chromium Hlau Sputter Target, thiab lwm yam.
